Advances in Biophotonics by Pira International Ltd

By Pira International Ltd

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Deep RIE (DRIE) is a highly anisotropic process used to fabricate microelectromechanical systems (MEMS) plus 2D and 3D photonic crystals. One method, called the Bosch process, uses two different plasma chemistries to create deep vertical sidewalls: an SF↓6/Ar mixture for etching and a C4F8/Ar mixture for sidewall passivation. One cycle of the DRIE process can be divided into three plasma subprocesses: deposition of a fluorocarbon polymer passivation layer, etching of the fluorocarbon polymer at the bottom of the trench, and etching of the underlying silicon.

Emerging materials Key emerging materials are indium, gallium, silicon, aluminium gallium arsenide, sapphire, arsenic and phosphorus. Active integrated devices are heterostructures, LEDs, quantum wells, surface plasmons, etc. Passive devices are waveguides, optical fibres, etc. These active and passive devices are building blocks for biosensors, microscopes, spectrometers, etc. For greater precision, some applications use polymers instead of inorganic materials, as they offer low absorption losses, good environmental stability and a tunable refractive index.

Com Established in 1997, Advanced BioPhotonics Inc. supplies biophotonics for breast cancer detection, cancer therapy monitoring, cardiac surgery, drug discovery, neurosurgery and reconstructive surgery. com Andor Technology develops and manufactures high-performance digital cameras that are widely used in biological applications, such as 4/5D microscopy, bioluminescent imaging, cell motility, chemiluminescent imaging, single-cell gel electrophoresis assay, fluorescence resonance energy transfer (FRET), fluorescent in situ hybridisation (FISH), immunofluorescence microscopy, ion-signalling microscopy, live cell confocal microscopy, single-molecule detection and total internal reflection fluorescence (TIRF) microscopy.

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